Superior Evaporants Incorporated

Technical Information

Material: Hafnium Oxide

 

 

Formula: HfO2 

Molecular weight: 210.6

Product Form: Grey tablets~2 grams (U.V. grade)

Catalog#:  1500

 

Density: 9.68 g/cm3

Melting point: 2850oC

Other:  Zr < 0.5%

 

Solubility: Insoluble in H2O 

 

 

Type analysis:

Iron(Fe)        < 4 ppm       Aluminum(Al)   < 2 ppm

Nickel(Ni)      < 7 ppm       Chromium(Cr)   < 5 ppm

Magnesium(Mg)   <35 ppm       Vanadium(V)    < 1 ppm

Cobalt(Co)      < 1 ppm       Antimony(Sb)   < 1 ppm

Lead(Pb)        <30 ppm       Tin(Sn)        < 1 ppm

Copper(Cu)      < 1 ppm

 

Properties of thin film:

 

Transmission range: 220‑12000nm

Refractive index at 250nm ~ 2.15

Refractive index at 500nm ~ 1.95

Evaporation temperature~2400oC

Structure: tetragonal

 

 

Hints on evaporation:

 

Substrate temperature ~ 250oC

Deposition rate ~ 50nm/min

O2 partial pressure ~ 1 x 10‑4 mbar

 

Evaporate using E‑Beam

 

 

Applications:

 

Anti‑reflection coatings, high damage threshold coatings e.g. inner cavity Nd:yag mirrors, U.V. coatings